(Randy, Jordan, Travis, Filiberto, Gerardo)
We closed four small gate valves, two at the relay tube, RV-1 and RV-2. Two at the filter cavity tube, between BSC3 and HAM7, FCV-1 and FCV-2. The purge air system was on since last week, with a dew point reported by the dryer tower of -66 oC, and -44.6 oC measured chamber side. Particulate was measured at the port by the chamber, zero for all sizes. HAM7 ion pump was valved out.
Filiberto helped us out with making sure high voltage was off at HAM7, we double checked with procedure M1300464. Then, system was vented per procedure E2300169 with no issues.
Other activities at the vented chamber:
Currently the chamber has the purge air active at a very low setting.
(Randy, Travis, Jordan, Gerardo)
-Y door was removed, no major issues removing it, but the usual O-ring sticking to flat flange, they stuck around the bottom part of the door, 5-8 O'clock. Other than that no other issues. Both blanks were removed and the ports were covered with an aluminum sheet.
Note, the soft cover will rub against ZM3 if the external jig to pull the cover is not used.